News & Events
Clarkson University Professor S.v. Babu Receives Prestigious Ibm Faculty Award
[A photograph for newspaper use is available at http://www.clarkson.edu/news/photos/babu.jpg]
S.V. Babu, Clarkson University’s Distinguished University Professor and director of Clarkson’s Center for Advanced Materials Processing (CAMP), has received a 2004 IBM Faculty Award.
In bestowing the highly competitive $25,000 award on Babu, IBM recognizes the quality of his research in the field of chemical-mechanical planarization (CMP), an area of critical importance to semiconductor device manufacturing.
Babu has led the research efforts in CMP at Clarkson for over 10 years now. He has published over 180 papers in journals and conference proceedings, edited three books on CMP, and has co-authored over 20 patents. Three of the patents in the area of CMP have been commercialized by Ferro Electronics, for which Clarkson has started receiving royalties this year.
Babu's research interests include CMP of Cu, Ta & SiO2, CMP for shallow-trench isolation, adhesion enhancement, thin film deposition, laser annealing, and particle-surface interactions. External funding for his research has totaled more than $9 million, and was provided over the years by IBM, Kodak, NYACOL Nano Technologies, Intel/SRC, JM Huber, Infotonics Technology Center, the National Science Foundation, the U.S. Department of Defense, NYSERDA, Ebara, St. Gobain, PPG Industries, and Rodel among others. Additionally he directs $1,000,000 in annual funding from the New York State Office of Science, Technology and Academic Research (NYSTAR) and about $350,000 in annual CAMP membership dues from various companies. He is also a consultant with several companies in the area of CMP and thin films.
During his tenure as Vice Provost, Research, external funding for research at Clarkson reached new highs every year and exceeded $16 million last year.
As CAMP director for the last five years, Babu has overseen multiple research initiatives. The Center is dedicated to developing Clarkson's research and educational programs in high-technology materials processing. CAMP's mandate is to develop innovations in advanced materials processing and to transfer this technology to business and industry.
CAMP is built on Clarkson's recognized expertise in colloid and surface science and fine particle technology. In addition to receiving a million dollars annually from NYSTAR for research and operating expenses as one of 15 Centers for Advanced Technology (CAT), CAMP-related research receives several million dollars in funding each year from the federal government and private industry.
Babu joined Clarkson in 1981 as an associate professor of chemical engineering. In 1999, he was appointed interim director of CAMP and one year later named CAMP director.He completed his doctorate at SUNY Stony Brook in physics after graduate study in chemical engineering at Johns Hopkins University. He was at the Niels Bohr Institute in Copenhagen and for eight years on the faculty at IIT, Kanpur, before coming to Clarkson. He has also worked with IBM at Endicott, Bellcore and Sandia National Laboratories while on leave from Clarkson.