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Cetin Cetinkaya

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Cetin CetinkayaProfessor
241 CAMP
Clarkson University
PO Box 5725
Potsdam, NY 13699-5725

Phone: 315-268-6514
Fax: 315-268-6438
E-mail: cetin@clarkson.edu

Educational Background
B.Sc., Technical University of Istanbul (1986)
M.S., University of Illinois - Urbana-Champaign (1991)
Ph.D., University of Illinois - Urbana-Champaign (1995)

Teaching
Professor Cetinkaya is a faculty advisor for the Clarkson Tau Beta Pi chapter. He has also served as the advisor for the Clarkson ASME Student chapter. Courses taught include:

ME591 - Nano/Micro-scale Systems Engineering (Special Topics)
ME654 (CE654) - Elastic Waves in Solids
ME551 – Theory of Elasticity
ME/AE555 - Advanced Mechanical Vibrations
ME445/446 - Integrated Design I-II
ES223 - Rigid Body Dynamics
ME/AE455 - Mechanical Vibrations and Control
ME 457 - Composite Mechanics and Design

Research Interests
Dr. Cetinkaya’s areas of research interests include solid mechanics, thermo-elastic wave propagation, transient finite element analysis and symbolic computing. He is the director of the Photo-Acoustics Research Laboratory at Clarkson University. Specific applications areas of the projects at the laboratory include laser ultrasonics, nondestructive evaluation of thin layered structures and testing/evaluation of small-scale objects. The laboratory has received research funds from the National Science Foundation, Intel, SEMATECH, Wyeth Pharmaceuticals, Praxair/Electronics as well as Center for Advanced Materials Processing (CAMP).

Acoustic Monitoring and Characterization of Drug Tablets
Physical properties and mechanical integrity of drug tablets as well as their coat thickness and quality can affect their critical therapeutic and structural functions. Monitoring for defects and the characterization of tablet mechanical properties are of great practical interest in drug tablet manufacturing and unit operations. The objective of this project is to develop non-invasive, non-destructive acoustic techniques for pharmaceutical manufacturing applications as well as to understand fundamental factors affecting mechanical properties of tablets.

Real-Time Acoustic Monitoring of Drug Tablet Compaction
Compaction represents one of the most essential unit operations in the pharmaceutical manufacturing industry because physical and mechanical properties of the tablets, such as density and strength (hardness/friability) as well as the functional characteristics (e.g. dissolution rate) are determined during this process. The objective of this project is to develop real-time acoustic techniques for monitoring compaction in dies. In the Photo-Acoustics Research Laboratory, we utilize an instrumented die-punch setup and  to simulate the compaction process, to extract elastic properties of drug tablet cores as well as to monitor the die-wall lubrication and die-fill height during pharmaceutical compaction process using acoustic methods.

Work-of-Adhesion Measurements of Chemical Toner Particles
In photocopying and printing, new generation chemical toner has various superior properties over traditional pulverized toner. However, research is required to understand adhesion properties of these particles and their relations to a number of other relevant parameters to take full advantage of his toner. In current study, two non-contact methods are employed to measure work-of-adhesion of an individual toner particle. It is demonstrated that work-of-adhesion can be extracted from the resonance frequencies of rocking motion of a particle under acoustic base and air-coupled excitations.

Transport and Manipulations of Micro-Particles on Dry Surfaces
Gaining fundamental understanding of the transport and motion of small-scale objects on dry surfaces is the focus of this research effort. The needs in this area have been growing, as more micro/nano-technology applications require the transport and manipulations in nano/micro-scale. Our research efforts in this area focus on the transport and motion characteristic of micro-spheres under the influence of acoustic fields generated in solid substrates and in air by piezoelectric transducers.

MEMS Rotational Disk Oscillators for High-Frequency Sensors
A free-standing rotational oscillator has been developed as a novel detection element in mass sensing in liquid and air media. Traditional oscillators, such as cantilever beams, operate in out-of-plane vibrational modes, which limit the operation frequencies, and result in excessive stresses and high damping (low Q factor) in the device leading to reduced measurement sensitivities. High damping associated with out-of-plane motion is particularly dominant in liquids. Rotational oscillators would drastically decrease damping and stress in liquid phase by providing a rotational mode. Our main research objective is to gain fundamental understanding in vibrational motion of such disks and their uses in practical sensing applications.

Effect of Residual Stress on Structure Stability of Microscale Membranes
During fabrication, large deformations are observed in very high-aspect ratio free-standing micro-scale membranes. Axi-symmetric and full three dimensional membrane models of a 1.6 μm thick, 6 mm diameter membrane were developed to study the structural stability of these membranes with substantial residual stresses.

MD Simulations of Nanoparticle-Substrate Adhesion
A Molecular Dynamics (MD) simulation study is initiated to gain fundamental understanding of rolling and sliding elasto-adhesion interactions between a spherical nanoparticle and a substrate. This study is needed to understand the modes of particle removal and detachment for cleaning of semiconductor substrates, MEMS, the strength and stability of network of adhered round objects in a diverse spectrum of applications (e.g. particles, powders, blood cells and nanotubes) on micro/nano-scale.

Shock Tube Pressure Amplification for LIP Nanoparticle Removal
Nanoscale substrate cleanliness is a critical requirement in nanotechnology and semiconductor applications. A novel particle removal technique based on Laser Induced Plasma (LIP) shockwaves has been introduced and evaluated for nanoparticle removal by the Photo-Acoustics Research Laboratory. An in-air and submerged method using shock tubes for amplifying the dynamic pressure of LIP shockwaves for removing sub-50 nmnanoparticles has been demonstrated.

Substrate Damage in Nanoparticle Removal under LIP Exposure
Damage-free sub-100nm particle removal is a challenge in the semiconductor industry and nanotechnology. Laser induced plasma (LIP) is an emerging technique for fast, dry, chemical-free, non-contact, precision and selective cleaning of sub-100 nm particles. Determination of the primary causes for material alterations and damage due to LIP application in nanofilms deposited on substrates utilized in EUVL/photomasks, as well as investigation of the onset of these material alterations were the objectives of this investigation.

Selected Publications

2008
Drug Tablet Thickness Estimations using Air-coupled Acoustics, I. Akseli, C. Cetinkaya, In Press for publication in the International Journal of Pharmaceutics.|

M. D. Murthy Peri, I. Varghese, C. Cetinkaya, Review on Rolling Moment Resistance, Accepted for publication in the J. of Adhesion Science and Technology (Special Issue on Nano/Micro-Scale Adhesion), February 2008.

Varghese, M. D. Murthy Peri, C. Cetinkaya, Review on LIP Particle Cleaning Accepted for publication in the J. of Adhesion Science and Technology (Special Issue on Nano/Micro-Scale Adhesion), February 2008.

2007
Rolling Resistance Moment of Microspheres on Surfaces: Contact Measurements, W. Ding, A. Howard, M.D. Murthy Peri, C. Cetinkaya, Philosophical Magazine, Vol. 87, Issue 36, pp. 5685-5696, 2007.

Transient Thermo-Elastic Response of Nanofilms under Radiation Heating from Pulsed Laser Induced Plasma, M. D. Murthy Peri, D. Zhou, I. Varghese and C. Cetinkaya, Accepted for publications in IEEE Transaction on Semiconductor Manufacturing, 2007.

Submerged Laser Induced Plasma Amplification of Shockwaves using Shock Tubes,  T. Dunbar, I. Varghese, M. D. Murthy Peri, C. Cetinkaya, Journal of Adhesion Science and Technology, Vol. 21, No. 14, pp. 1425–1437, 2007.

Underwater Pressure Amplification of Laser-Induced Plasma Shockwaves for Particle Removal, T. Dunbar, C. Cetinkaya, Applied Physics Letters, Vol.91, No.5, 2007.

Thermal Loading of Laser Induced Plasma Shockwaves on Thin Films in Nanoparticle Removal, D. Zhou, M.D. Murthy Peri and C. Cetinkaya, Journal of Applied Physics, 101, 113106, 2007.

Air-Coupled Excitation of Rocking Motion of Individual Microspheres on Surfaces, M. D. Murthy Peri and Cetin Cetinkaya, Applied Physics Letters, 90, 171906, 2007.

Air-coupled Acoustic Method for the Testing and Evaluation of Micro-scale Structures, J. Ricci, C. Cetinkaya, Review of Scientific Instruments, Vol. 78, No. 5, 2007.

Non-contact Photo-acoustic Defect Detection in Drug Tablets, Ivin Varghese and Cetin Cetinkaya, Journal of Pharmaceutical Sciences, Vol. 96, No. 8, 2007.

Selective Removal of 10-40nm range Particles from Silicon Wafers using Laser Induced Plasma Shockwaves, M. D. Murthy Peri, V. K. Devarapalli, C. Cetinkaya, Journal of Adhesion Science and Technology, 21 (3-4): 331-337, 2007.

Pressure Amplification of Laser-Induced Plasma Shockwaves with Shock tubes for Nanoparticle Removal, T. Dunbar, B. Maynard, D. A. Thomas, M. D. Murthy Peri, I. Vargehese, C. Cetinkaya, Journal of Adhesion Science and Technology, Vol. 21, No. 1, 67-81, 2007.

Nanoparticle Removal Using Laser-Induced Plasma Shockwaves, M. D. Murthy Peri, Ivin Varghese, Dong Zhou, Arun John, Chen Li, Cetin Cetinkaya, Particulate Science and Technology, Vol. 25, No. 1, 91-106, 2007.

2006

Acoustic Monitoring of Non-uniformly Eroded PVD Targets, L. Ban, Alireza Ziarani and C. Cetinkaya, IEEE Transactions on Semiconductor Manufacturing, Vol. 19, No. 4, 2006.

Molecular-level Mechanisms of Nanoparticle Detachment in Laser-induced Plasma Shockwaves, Dong Zhou and Cetin Cetinkaya, Applied Physics Letters, 88, 173109, 2006.

Frequency Domain Thickness Measurement Approach for Microscale Multilayered Structures, Chen Li, C. Cetinkaya, IEEE Transactions on Instrumentation and Measurement, Vol. 55, No. 1, 2006.

Particle Removal with Liquid-film-enhanced Laser-Induced Plasma, V. K. Devarapalli, M. D. M. Peri, C. Cetinkaya, Journal of Adhesion Science and Technology, Vol. 20, No. 2-3, pp. 133-244, 2006.

Nanoparticle Detachment using Shockwaves, Dong Zhou, A. T. John Kadaksham, M. D. Murthy Peri, Ivin Varghese, C. Cetinkaya, Journal of Nanoengineering and Nanosystems, Vol. 219, No. 3, pp. 91-102, 2006.