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Hard Core and Soft Surface Abrasives for Use in CMP

Senior University Professor Richard Partch and his group are investigating the use of hard core and soft surface abrasives in CMP. Hard cores and soft surfaces are showing promise as a next generation of abrasives for use in CMP slurries for the polishing of wafers having different compositions. Ongoing development of such types of particles (having different core size, hardness, and density, and several examples of polymers deposited on their surface by controlled and high yield chemical or physical processes), has already yielded polishing results which merit recognition by the semiconductor industry. Professor Richard Partch, Research Associate Dr. Sudha Rani and graduate student Nathaniel Barney are in the process of optimizing two new types of abrasives prepared using their techniques. Their chemical method of coating is carried out by addition or condensation polymerization reactions in a dispersion of the cores plus monomers, while the physical method involves precipitation of dissolved polymers in a dispersion with cores using a non-solvent.
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CAMP's SEVENTH CMP SYMPOSIUM

NYSTAR Executive Director Dr. Russell Bessette to Receive Honorary Degree at Clarkson

Dr. Russell Bessette, Executive Director of New York State's Office of Science, Technology, and Academic Research (NYSTAR) will receive an honorary degree at Clarkson University's 110th Commencement on Sunday, May 11, 2003.

 

 

 

 

 


Professor Egon Matijevic' and his wife Bozica donate the sculpture "La Ricerca" to Clarkson University. From left: Clarkson University President Denny Brown, Bozica Matijevic', and Professor Egon Matijevic'.

CAMP Professor Egon Matijevic' Donates Sculpture to Clarkson University

Professor Egon Matijevic', the Victor K. LaMer Chair in Colloid and Surface Science, and his wife Bozica have donated a sculpture by Italian artist Domenico Colanzi to Clarkson University. This donation is in honor of Professor Matijevic''s 80th birthday and in celebration of his 45 years of professional service to Clarkson. Professor Matijevic' was honored for his lifetime accomplishments in chemistry at the American Chemical Society's National Meeting in Boston during the month of August. In addition, Charles and Lucia Shipley donated $2 million to Clarkson University for an endowed chair to honor him for a lifetime of professional achievement in the field of colloid chemistry. Professor Matijevic', a renowned chemist, is the author of over 550 scientific papers and the only individual to ever receive all three major awards of the American Chemical Society in his field of colloid chemistry. He has delivered many plenary and keynote lectures around the world and has numerous awards to his name. Also he has attracted millions of dollars of research support, was instrumental in the founding of the Institute of Colloid and Surface Science at Clarkson University, and played a vital role in the emergence of Clarkson's Center for Advanced Materials Processing (CAMP) and its recognition as a Center for Advanced Technology (CAT) in New York State.

The bronze sculpture, titled "La Ricerca," which means research, was presented to the University at a special dedication and reception held last fall at the Center for Advanced Materials Processing (CAMP) building, where the sculpture will remain on display for the benefit of faculty, students and visitors. The sculpture is the result of a unique collaborative design effort between the noted Italian artist Colanzi and Professor Matijevic', who have maintained a close friendship over the last two decades. The sculpture features a bull, a creature that symbolizes an aggressive, charging approach, characteristics necessary for successful research. Added to the central theme are sculptured colloidal particles, which were taken from original electron micrographs. (See photo.)

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