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Hard
Core and Soft Surface Abrasives for Use in CMP
Senior University
Professor Richard Partch and
his group are investigating the use of hard core and soft surface
abrasives in CMP. Hard cores and soft surfaces are showing promise
as a next generation of abrasives for use in CMP slurries for the
polishing of wafers having different compositions. Ongoing development
of such types of particles (having different core size, hardness,
and density, and several examples of polymers deposited on their
surface by controlled and high yield chemical or physical processes),
has already yielded polishing results which merit recognition by
the semiconductor industry. Professor Richard Partch, Research Associate
Dr. Sudha Rani and graduate student Nathaniel Barney are in the
process of optimizing two new types of abrasives prepared using
their techniques. Their chemical method of coating is carried out
by addition or condensation polymerization reactions in a dispersion
of the cores plus monomers, while the physical method involves precipitation
of dissolved polymers in a dispersion with cores using a non-solvent.
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NYSTAR
Executive Director Dr. Russell Bessette to Receive Honorary
Degree at Clarkson
Dr.
Russell Bessette, Executive Director of New York State's
Office of Science, Technology, and Academic Research (NYSTAR)
will receive an honorary degree at Clarkson University's
110th Commencement on Sunday, May 11, 2003.
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Professor
Egon Matijevic' and his wife Bozica donate the sculpture "La Ricerca"
to Clarkson University. From left: Clarkson University President
Denny Brown, Bozica Matijevic', and Professor Egon Matijevic'.
CAMP
Professor Egon Matijevic' Donates Sculpture to Clarkson University
Professor
Egon Matijevic', the Victor K. LaMer Chair in Colloid and Surface
Science, and his wife Bozica have donated a sculpture by Italian
artist Domenico Colanzi to Clarkson University. This donation
is in honor of Professor Matijevic''s 80th birthday and in celebration
of his 45 years of professional service to Clarkson. Professor
Matijevic' was honored for his lifetime accomplishments in chemistry
at the American Chemical Society's National Meeting in Boston
during the month of August. In addition, Charles and Lucia Shipley
donated $2 million to Clarkson University for an endowed chair
to honor him for a lifetime of professional achievement in the
field of colloid chemistry. Professor Matijevic', a renowned chemist,
is the author of over 550 scientific papers and the only individual
to ever receive all three major awards of the American Chemical
Society in his field of colloid chemistry. He has delivered many
plenary and keynote lectures around the world and has numerous
awards to his name. Also he has attracted millions of dollars
of research support, was instrumental in the founding of the Institute
of Colloid and Surface Science at Clarkson University, and played
a vital role in the emergence of Clarkson's Center for Advanced
Materials Processing (CAMP) and its recognition as a Center for
Advanced Technology (CAT) in New York State.
The
bronze sculpture, titled "La Ricerca," which means research, was
presented to the University at a special dedication and reception
held last fall at the Center for Advanced Materials Processing
(CAMP) building, where the sculpture will remain on display for
the benefit of faculty, students and visitors. The sculpture is
the result of a unique collaborative design effort between the
noted Italian artist Colanzi and Professor Matijevic', who have
maintained a close friendship over the last two decades. The sculpture
features a bull, a creature that symbolizes an aggressive, charging
approach, characteristics necessary for successful research. Added
to the central theme are sculptured colloidal particles, which
were taken from original electron micrographs. (See photo.)
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