CONTINUES TO INVESTIGATE VARIOUS ASPECTS OF THE CHEMICAL-MECHANICAL
make excellent progress as they investigate various fundamental
aspects of the chemical-mechanical polishing (CMP) process. CAMP's
CMP team is led by Professor S.V. Babu (Vice Provost / CAMP Director),
who recently presented the first Dongjin Lecture "Recent Progress
and Emerging Challenges in Chemical-Mechanical Planarization" at
the 2002 KSIEC Fall Meeting in Korea. Team members include Professors
Ahmadi, Li, Matijevic', Partch, Rasmussen, Shipp, Sokolov, and Subramanian.
Highlights of their work are provided
Babu's research group continues to investigate various aspects
of chemical-mechanical planarization (CMP) of metal and dielectric
films. Recent emphasis has been on mixed abrasives and 'engineered'
particles in different chemical environments and on defect mitigation.
The group's results show that some of the problems associated with
the use of a single abrasive slurry, such as poor polish selectivity,
surface defects and slurry instability, can be overcome by combining
two or more different abrasives. They found that by using different
particle sizes and by taking advantage of differing surface charges
on the abrasives, both selectivity and polished surface roughness
can be improved systematically. Their results have been presented
at several conferences and published in journal papers, available
at the CAMP website.
Provost /CAMP Director S.V. Babu welcomes Governor George Pataki
to CAMP. Front row from left: Provost Anthony Collins, S.V. Babu,
Senator Raymond Meier, and Governor George Pataki.
Pataki Visits Clarkson to Announce $4.5m Research Grant
Pataki recently visited Clarkson to announce a $4.5 million Gen*NY*sis
grant for Clarkson University to use for biotechnology research.
Gen*NY*sis (Generating Employment through New York State Science)
is a biotechnology economic development program that was initiated
in the 2002-03 state budget. Clarkson will use the grant to fund
its Center for Assistive and Adaptive Technologies. This Center
encourages interdisciplinary research and development in the areas
of engineering, science, and health science
In addition the Board of Trustees of Clarkson University presented
"The Bertrand H. Snell Award" to Governor Pataki, in recognition
of his high levels of achievement, personal integrity, and community
concern. This award was created to duly and publicly recognize individuals
of outstanding merit and to assure remembrance of Mr. Snell's great
contributions. Mr. Snell, one of the North Country's most highly
regarded political leaders and entrepreneurs, served as a Clarkson
trustee for 47 years.