CAMP Annual Report:Page 5
Novel Polymer Materials for CMP Applications
Working with Dr. Yuzhuo Li at BASF, CAMP Professor Devon Shipp is working toward the goal of producing polymer particles for CMP that make the CMP slurry a simpler composition, that significantly reduce copper corrosion and that result in easier post-CMP cleaning. The particles are designed using the “molecular imprinting” approach. Molecular imprinting is the introduction of recognition sites into the polymer by employing a functional molecule as a template and co-polymerizing a functional monomer and a cross-linker around the template. The unique outcomes of making molecular imprinted polymers are that they are quite robust (due to the high degree of cross-linking) and highly selective towards the functional molecular template.
Nanoadhesion and Nanoparticle Removal Techniques for Surface Cleaning
The Photo-Acoustic Research Laboratory (PAR) directed by Professor Cetin Cetinkaya has been conducting analytical, computational and experimental studies in the areas of laser-based particle removal and non-contact nano-adhesion measurements since 1999. There is an immense need in variousindustries for dry, non-contact removal of micro/nano-particles (especially in 100-nm range) from blank and patterned substrates. PAR Lab has developed a novel dry cleaning method to remove micron and submicron particles. The approach, based on laser-induced plasma shockwaves, is a non-contact method and the removal efficiency is an order of magnitude higher than the traditional laser cleaning methods. Recent experiments have proved that a latex particle with a diameter of 60 nm and larger particles can be removed from silicon surfaces without damage. The dry laser cleaning method is being used to remove micron and submicron particles from varying substrates as well as from micro-holes and semiconductor trenches. The research in this area at the PAR Laboratory has been supported by Intel Corporation, International SEMATECH and Praxair/Electronics.
Modeling of the Chemical‑Mechanical Polishing Process
Professors Goodarz Ahmadi and S.V. Babu, in collaboration with the JSR company, are developing new models for the chemical‑mechanical polishing of low-k materials. Their analysis includes the influence of abrasive particles and pad surface micro-roughness. Earlier, Professor Ahmadi and his students studied the effect of abrasive particle shapes, slurry pH, and colloidal forces on the CMP removal rate.
Colloid Investigations for Composite, Environmental, Medicinal and Microelectronic Applications
CAMP Professor Richard Partch’s research focus is on particle synthesis and surface modification, which primarily involves controlled preparation of core-shell particles for 1) use as abrasives in CMP processing of wafers; 2) control of chemical overdoses; 3) improvements in electrical or thermal conductivity in polymer/rubber composites; and 4) filtration of toxic chemicals leached from plastic bottles containing water and food. Some details are as follows.
1) Mixed polymer/metal oxide core shell submicron particles are being prepared by group members Tania Tannahill, Deborah Shipp, Lauren Gaskell and Lifeng Chen for study by collaborator CAMP Professor Babu for potential applications in CMP. Two separate projects are funded by BASF and by Micron.
2) Antidotes for commonly overdosed chemicals such as acetaminophen in Tylenol, biotoxin such as Ricin, and plasticizer contaminants such as bisphenol A in plastic food packaging materials continue to be evaluated by Partch and group members Chen-Yu Lin and Jennifer Sidletsky. This work extends to removal of aromatic contaminants in industrial waste streams.
3) Several compositions and morphologies of carbon, metal, metal oxide, metal nitride and metal carbide particles as fillers in plastic and rubber resins are being studied by group members Nathan Victor and David Gervasi and Matt Kelly to reduce energy use of copy machines.
U.S. Army Research Project: Smart Responsive Nanocomposites for Soldier ProtectionThe $2M Army Research Office (ARO) project on Smart Responsive and Nanocomposite Systems continues at Clarkson University. The research is led by CAMP Director Professor S.V. Babu and CAMP Professors Sergiy Minko and Igor Sokolov. The whole team includes ten other CAMP Professors: Ahmadi, Cetinkaya, Li, Jha, McLaughlin, Moosbrugger, Morrison, Privman, Shipp, and Suni. Two goals of the project are to develop protective clothing and self-healing composites
Modeling of Smart Nanocomposites for Soldier Protection
Professors John McLaughlin and Goodarz Ahmadi (members of the US Army Research project team) are developing computer simulation programs to simulate the movement of liquid drops in “gradient” clothing. The idea underlying the work is that, by blending fibers of different wettabilities in a multilayer fabric, one can produce a wettability gradient that will block aerosolized chemicals from reaching a soldier’s body while permitting perspiration to pass through to the outer surface and evaporate. In the current phase of the modeling effort, the emphasis is on lattice Boltzmann method simulations since the LBM permits one to directly control physical properties such as equilibrium contact angles. The results of these simulations will be used to test volume of fluid (VOF) programs that are developed with FLUENT. The latter programs will be used for larger scale simulations of more realistic geometries.
Professor Richard Partch (left) gave a Plenary Lecture to the attendees at the XVII International Materials Research Congress. Following this talk, Dr. Jose Manuel Dominguez (Director of Research, Instituto Mexican del Petroleo/PEMEX) presented a commemorative plate of the Meeting to him.
CAMP Professor Richard Partch Gives Major Presentations at Joint American/Mexican MRS Meeting in Cancun
During the week of August 17-22, CAMP Professor Richard Partch gave three major presentations at the joint American/Mexican MRS Meeting in Cancun. All of them focused on various aspects of his CAMP research group’s achievements in particle surface modification. His 7-hour Short Course was followed by an invited Keynote paper in the Symposium on Catalysis. He also gave a Plenary Lecture to the attendees at the XVII International Materials Research Congress. His Lecture was titled “Particle Surface Modification for Improved Properties and Applications.” Following this talk, Dr. Jose Manuel Dominguez (Director of Research, Instituto Mexican del Petroleo/PEMEX) presented a commemorative plate of the Meeting to Professor Partch.
CAMP Educational Outreach Activities
In addition to teaching courses in their own departments at the University, CAMP faculty members serve as mentors to undergraduate students and to high school teachers. Seven entering freshmen, selected for CAMP's 5-week Summer Research Experience, were mentored by CAMP Professors Andreescu, Jachuck, Neithalath, Partch, Subramanian and Suni. Several northern New York area high school science teachers took the CAMP/STEM one-week workshop titled "Finding Nano." It was presented by Professors Ding, Hua, Moosbrugger, Partch and Suni. Also two teams of Juniors (undergraduate honors students) are being mentored by CAMP Professors Goia, Partch and Shipp on the topics of Nanotechnology in Photovoltaics, in Medicine, and in Cosmetics and Paints.