M.Tech/M.S. Theses Supervised
M.Tech/M.S. Theses Supervised:
- Simulation of the performance of a continuous CO laser. (P. Ojha, 1974)
- Design and construction of a TE CO2 laser. (K. A. Dambal, 1975)
- Variational calculation of the thermodynamic properties of CO2. (M. Antony, 1977)
- Fabrication and characteristics of a chemical CO laser. (G. S. Kishore, 1977)
- Equation of state for polar and non polar fluids. (C. Pattnaik, 1979)
- Mechanism for n butane decomposition at high temperatures. (S. Subramanian, 1980)
- Thermal degradation of some polymers. (V. Srinivasan, 1982)
- Kinetics and mechanisms of a Riston negative photoresist. (J. Zubritsky, 1984)
- Laser drilling studies of plexiglas and epoxy/glass composites. (J. Potenza, 1984)
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The kinetics of the CF4/O2 plasma etching of polymers. (J. Rembetski, 1985)
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Optimization of Riston photopolymerization. (R. Geary, 1985)
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Transient response studies of plasma etching of polymers. (K. Mack, 1987)
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Additive bath circulation design. (N. Gretzinger, 1986)
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Excimer laser induced etching. (M. Armacost, 1986)
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Photoresist kinetics. (J. Ferrari, 1987)
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Cermet etching in plasma discharges. (E. Malocsay, 1987)
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Trans¬ient behavior of plasma reactors. (P. Scott, 1987)
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Excimer laser induced deposition of copper. (M. Ritz, 1987)
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Laser and rf plasma-induced deposition of copper films. (R. Padiyath, 1990)
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Engineering Multimedia (K. Tilstra, 1996)
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CD-ROM project on thin film technologies. (P. Srisudha, 1997)
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Deposition and characterization of indium-tin-oxide films (J. Li, 1996).
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Laser-induced ablation of ULE glass (R. Clark, 1996).
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Chemical-mechanical polishing of copper films (V. Rajasekhar, 1998).
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Deposition of high-k films by CVD (J. Dalton, 1998).
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Chemical-mechanical polishing of metal films (P. Teegapuram, 2000)
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Chemical-mechanical polishing of patterned structures (D. Stoll, 2002)
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Silica particle characteristics in chemical-mechanical polishing (S. Narayanan, 2002)
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Studies on abrasive particle breakdown & comparison of an experimental fixed abrasive pad with a 3-M fixed abrasive pad (U. Patri, 2003)
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Adhesion measurements for Cu and barrier film CMP (S. Pandija, 2005)
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Preparation and Evaluation of Mixed Abrasive Slurries for Chemical Mechanical Planarization of Copper and Tantalum (S. Janjam, 2006)
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Effect of various dopants on the barrier and optical properties of DLC films (Shilpa Rudrabhatla, 2006)
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Dodecyl benzene sulfonic acid as corrosion inhibitor in copper CMP: Charan Surisetty (Jan.2008)
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Selective chemical mechanical planarization of silicon dioxide over silicon nitride in STI process: Pradeep Dandu (Feb. 2008)
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Chemical mechanical polishing of Ta in silica based slurries: Shivaji Peddeti (April 2009)
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Chemical mechanical polishing of Ge in peroxide based slurries: Role of Ionic strength: John B. Matovu (April 2011)








