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S.V. Babu

In this Section

Distinguished University Professor and Director, CAMP
350 CAMP
Clarkson University
PO Box 5665
Potsdam, NY 13699-5665

Phone: 315-268-2336
E-mail: babu@clarkson.edu 

Educational Background:

Ph.D. (Physics) SUNY at Stony Brook, USA, 1971
Graduate study in Chemical Engineering Johns Hopkins Univ., Baltimore, USA, 1963-66
M.Tech (Chem. Eng.) Indian Inst. of Tech., Kharagpur, INDIA, 1963
B.Tech (Chem. Eng.) Andhra University, INDIA, 1962

Research Interests:

  • Chemical mechanical planarization (CMP) of Cu, Ta & SiO2 films and structures
  • CMP for shallow-trench isolation
  • Selective CMP for metal and dielectric films
  • Particle-free solutions for CMP
  • Post-CMP cleaning
  • Particle-Surface Interactions

 

Jobs Held

Professional and Honor Societies

Professional Activities and Honors

Consulting

Contracts and Grants Administered

Patents

Recent Publications

Ph.D. Theses Supervised

M.Tech/M.S. Theses Supervised

 

Dr. S.V. Babu