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S.V. Babu

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Distinguished University Professor and Director, CAMP
350 CAMP
Clarkson University
PO Box 5665
Potsdam, NY 13699-5665

Phone: 315-268-2336

Educational Background:

Ph.D. (Physics) SUNY at Stony Brook, USA, 1971
Graduate study in Chemical Engineering Johns Hopkins Univ., Baltimore, USA, 1963-66
M.Tech (Chem. Eng.) Indian Inst. of Tech., Kharagpur, INDIA, 1963
B.Tech (Chem. Eng.) Andhra University, INDIA, 1962

Research Interests:

  • Chemical mechanical planarization (CMP) of Cu, Ta & SiO2 films and structures
  • CMP for shallow-trench isolation
  • Selective CMP for metal and dielectric films
  • Particle-free solutions for CMP
  • Post-CMP cleaning
  • Particle-Surface Interactions


Jobs Held

Professional and Honor Societies

Professional Activities and Honors


Contracts and Grants Administered


Recent Publications

Ph.D. Theses Supervised

M.Tech/M.S. Theses Supervised


Dr. S.V. Babu