- William Wilcox
- Ian Suni
- R. Shankar Subramanian
- Igor Yu. Sokolov
- Devon Shipp
- Hayley Shen
- Dipankar Roy
- Liya Regel
- Don H. Rasmussen
- Richard E. Partch
- Narayanan Neithalath
- David Morrison
- John Moosbrugger
- Sergiy Minko
- John B. McLaughlin
- Egon Matijević
- Piergiovanni Marzocca
- Yuzhuo Li
- Sitaraman Krishnan
- Evgeny Katz
- Kerop Janoyan
- Roshan Jachuck
- Kathleen Issen
- Feng Hua
- Philip Hopke
- Dan Goia
- Benjamin Dorfman
- Weiqiang Ding
- Suresh Dhaniyala
- Ming-Cheng Cheng
- Cetin Cetinkaya
- Gregory A. Campbell
- S.V. Babu
- Silvana Andreescu
- Daryush K. Aidun
- Goodarz Ahmadi
- Director & Faculty
S.V. Babu
Distinguished University Professor and Director, CAMP
305 CAMP
Clarkson University
PO Box 5665
Potsdam, NY 13699-5665
Phone: 315-268-2336
E-mail: babu@clarkson.edu
Educational Background:
Ph.D. (Physics) SUNY at Stony Brook, USA, 1971
Graduate study in Chemical Engineering Johns Hopkins Univ., Baltimore, USA, 1963-66
M.Tech (Chem. Eng.) Indian Inst. of Tech., Kharagpur, INDIA, 1963
B.Tech (Chem. Eng.) Andhra University, INDIA, 1962
Research Interests:
- Chemical mechanical planarization (CMP) of Cu, Ta & SiO2
- Plasma etching and deposition
- Laser-induced/enhanced materials processing
- Adhesion enhancement
- CMP for shallow-trench isolation
- Writing of copper lines
- Thin film (diamond-like carbon, BN, AlN, etc.) deposition
- Laser annealing
- Particle-Surface Interactions
Professional and Honor Socities
Professional Activities and Honors
Contracts and Grants Administered